furnace

Model

TCHVWF-25-21

Max. Power

25KW

Max. temperature

 2100℃

Heating element

 High Purity Tungsten

Working space

 Dia60×80mm

Temp. Keeping method

  Tungsten, molybdenum, stainless steel heat shield

Chamber

Temp. controller

EUROTHERM 3504

   Chamber vacuum degree

(with molecular pump)

< 5×10-4Pa  （without load ,cold state）

Working vacuum degree

< 5×10 -3Pa  （without loading）

atmosphere

Chamber inflation pressure

＜0.05MPa

Pressure increasing rate

<4Pa/hour

Thermocouple broken protection and display

Yes

Over-temp. protection

Yes

Over-current protection

Yes

Underpressure protection (water pressure)

Yes

Temp. Controller accuracy

+/-  1 ℃（more than 600℃）

Temperature testing

  Thermocouple

Max. Heating rate

 < 20℃/Min

Water cooling

Yes

Water chiller

(optional)

6P

Vacuum system

Inlet voltage

380V /220V

Vacuum Bellows pipe

KF40×1000

Vacuum flapper valve

KF40

           Molecular pump

（option 1）

Model

  TCHFJ620C

 Input voltage

 220V

  Molecular pump inlet port flange

  DN160

Molecular pump pumping rate L/S (for air)

  600

Molecular pump ultimate pressure（Pa)

6×10-7

Cooling method

 Water cooling

Cooling water pressure（MPa）

 0.1-0.2

Cooling water temp.

<25℃

Environment temp

0~40℃

Recommended starting pressure

<10pa

  Fore-line vacuum pump DRV-30

Power

0.75KW

Voltage

380V

speed

1450rpm

Inlet diameter

 KF25/KF40

Foreline pump pumping rate（L/S）

8

Ultimate pressure

4X10 -2Pa

 Compound Vacuum Gauge

(option 2)

Model

ZDF

Voltage

 220V   55W

Control accuracy

± 1%

 Vacuum degree range

10-5 -10 5 Pa