VTC-100A is a compact spin coater with vacuum chucks designed for easy and quick coating via sol-gel for wafers up to 4". The spinning speed is variable from 500-8000 rpm with two programmable segments. The package comes included with complete accessories for immediate use.
Specification:
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Structure |
· Aluminum casting case to keep spinning stably · The liquid disk made of Polypropylene (PP) to resist most of the corrosive solutions · Drainage outlet and vacuum pump connector are on the back panel · One filter is included in the standard package. It is used to connect the coater for preventing wastewater flowing into the pump · One oil-less vacuum pump is included in the standard package. |
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· Chamber Diameter: 145 mm · 3 sets of PP anti-corrosive vacuum chucks with chuck o-ring come in different sizes (1'', 2'' and 4'') |
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Vacuum Pump |
· One 120L/min Oilless Vacuum Pump is included. · Vacuum grade rubber pipe is included for immediate use. |
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Spin Speed & Time |
· Digital control panel with TWO programmable segments for different spin times and speeds · Spinning speed: 500 - 8000 RPM · Spinning Time: 1 - 60s |
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Liquid Injecting |
· 20mL syringe is used to contain the coating material · The syringe holder height can be adjusted and rotated freely along the support rod |
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Input Power |
220VAC |
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Motor Power |
24V DC motor with 150W Max. |
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Product Dimensions |
13''(L) x 10''(W) x 8.5''(H) |
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Net Weight |
15 kg |
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Warranty |
· One year limited with lifetime support · Rusting and damage due to improper storage condition or maintenance are not covered by warranty |
